Microelectromechanical systems promise to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, moving us closer towards the realization of complete systems-on-a-chip. Anil Deisingh talks us through the basics of MEMS technology and the growing role of these new ″micromachines″ in analytical chemistry applications.
A. K. Deisingh, Analyst, 2003, 128, 9 DOI: 10.1039/B211229A
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