CF3, CF2, and CF surface groups formed when diamond is exposed to microwave-discharged SF6 may be characterized and quantitatively estimated by X-ray photoelectron spectroscopy.
P. Cadman, J. D. Scott and J. M. Thomas, J. Chem. Soc., Chem. Commun., 1975, 654 DOI: 10.1039/C39750000654
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