Hydrosilanes. From Laboratory Curiosity to Semiconductors

Abstract

Hydrosilanes represent a versatile class of silicon compounds that bridge fundamental main-group chemistry with technologically relevant materials science. Since the early discovery of monosilane in the nineteenth century, the chemistry of silicon hydrides has evolved from a laboratory curiosity into a cornerstone of modern semiconductor processing and silicon materials synthesis. This review provides a comprehensive overview of hydrosilane chemistry, focusing on three central aspects: (i) synthetic approaches to mono-and oligohydrosilanes, (ii) their functionalization through silanide intermediates and related transformations, and (iii) their application as molecular precursors for silicon-based materials and deposition technologies.