Atomic ribbons formation in pulsed laser patterning of WS2 layers

Abstract

Precise modulation of the thickness of two-dimensional (2D) semiconductor transition metal disulfide (TMD) by laser thinning techniques to affect the electronic properties of TMD materials has been recognized as a promising approach. However, how to achieve precision patterning during layer-by-layer modulation is crucial for junction fabrication and device engineering. Here we discover atomic nanoribbon generation, namely atomic laser-induced periodic structure (LIPSS) effect by tuning the laser pulse width, energy and other processing parameters. We explore the evolutionary mechanisms of 2D films during laser processing, including in monolayer, multilayer, and composite multilayer films. It is verified experimentally and by molecular dynamics simulations (MD), and it is concluded that such atomic nanoribbons can only be formed under the action of short-pulse (<ns) lasers.