Microstructure Engineering for Tactile-enabled Embodied Intelligence

Abstract

Flexible pressure sensors are the cornerstone of tactile perception for embodied intelligence, serving as critical components in next-generation technologies such as soft robotics, personalized healthcare, and immersive human-machine interfaces. Microstructure engineering has emerged as a pivotal strategy for dramatically enhancing key sensor performance metrics, including sensitivity, detection limit, linear range, and response time. This review comprehensively summarizes recent advancements of high-performance flexible intelligent pressure sensors employing microstructural designs. It systematically explores the design strategies and fabrication techniques of various microstructures, including pyramids, hemispheres, micropillars, porous networks, and their hybrids, and elucidates their role in optimizing sensor performance. Furthermore, cutting-edge applications across wearable electronics, electronic skin, and virtual/augmented reality (VR/AR) systems are highlighted, where embodied intelligence is enabled through real-time tactile feedback. Finally, the review present a forward-looking perspective on prevailing challenges and future research directions, focusing on scalable manufacturing, seamless system integration, and the development of intelligent sensing systems for real-world artificial intelligenc