Development of a 16-Channel Solid-State Nanopore Array Platform for Integrated Nanopore Fabrication and Ionic Current Measurement

Abstract

Parallel solid-state nanopore measurements are expected to improve not only throughput but also molecular discrimination performance. Here, we report the development of a 16-channel solid-state nanopore array measurement system that enables parallel nanopore fabrication by dielectric breakdown and subsequent ionic current recording. The system supports two fabrication modes: pulsed-voltage-induced dielectric breakdown (MPVI) and controlled dielectric breakdown (CBD) under constant-voltage bias, allowing nanopore formation over a wide diameter range. To demonstrate the operation of the developed system, two experimental studies were conducted. In the first study, nanopores were fabricated in 5-nm-thick SiN membranes using MPVI, followed by detection of single-stranded DNA (ssDNA) translocation. Arrays of nanopores with diameters ranging from 1 to 2 nm were formed, and the pore-diameter dependence of dwell time and current blockade amplitude during ssDNA translocation could be evaluated at sub-nanometer resolution. In the second study, nanopores were fabricated in 14-nm-thick SiN membranes using CBD, and double-stranded DNA (dsDNA) translocation was detected. Analysis of current traces during CBD suggested that pore enlargement remained limited for a period after dielectric breakdown, followed by accelerated pore growth accompanied by a rapid increase in current. The resulting pore diameters were distributed within 8–10 nm for 13 of the 16 channels and within 8–9 nm for 12 channels, demonstrating tight size control across most channels. Using these fabricated nanopores, dsDNA translocation events were observed in all channels.