Issue 16, 2025, Issue in Progress
From the journal:

RSC Advances

Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance†

Zhun Gu,a   Kaitong Yang,b   Hayford Boamah,b   Dong Chen,b   Zhiqiang Zhu ORCID logo *a  and  Jie Wang*b  

* Corresponding authors

a School of Biomedical Sciences, Suzhou Chien-shiung Institute of Technology, 1 Jianxiong Road, Suzhou 215411, China
E-mail: zhuzq@csit.edu.cn

b Institute for Advanced Materials, Jiangsu University, Zhenjiang, China
E-mail: wangjie@ujs.edu.cn

Abstract

We report a quantitative method for the real-time evaluation of photoresist performance that integrates laser irradiation with quartz crystal microbalance (QCM) sensing technology. The results obtained for the model photoresist AZ1518 correlated with the traditionally obtained ones. Furthermore, the system revealed viscoelastic transitions and shear stress evolution during photoreactions.

Graphical abstract: Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance

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Article information

DOI
https://doi.org/10.1039/D4RA05762G
Article type
Paper
Submitted
08 Aug 2024
Accepted
02 Apr 2025
First published
17 Apr 2025
This article is Open Access
Creative Commons BY license

RSC Adv., 2025,15, 12304-12308

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Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance

Z. Gu, K. Yang, H. Boamah, D. Chen, Z. Zhu and J. Wang, RSC Adv., 2025, 15, 12304 DOI: 10.1039/D4RA05762G

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