A liquid metal based, integrated parallel electroosmotic micropump cluster drive system

Abstract

The application of liquid metal in a microfluidic system enables the fabrication of highly integrated on-chip electroosmotic micropumps (EOPs). In this work, a low-voltage driveable integrated parallel EOP cluster drive system is proposed. This system consists of two layers, a branch-channel layer and a trunk-channel layer. The lower branch-channel layer contains separate parallel pumping channels and a pair of comb liquid metal electrodes. The separated branch channels are connected together through the trunk channels in the upper layer. With this structural arrangement, the parallel micropumps form an integrated micropump cluster for larger pumping capacity. The distance between the pumping channel and the electrode next to it is controlled to 20 μm. To guide the pump design, parametric studies are performed and fully discussed. According to the experimental results, the micropump cluster can be driven at a low voltage of 0.5 V, and the flow rate reaches 274 nL min⁻¹ at 5 V. In addition, the paper finally proposes an electrode protection strategy and an integrated pump-valve drive system which is expected to solve the shortcoming of electroosmotic pumps in terms of long-time storage and driving.