Strain effect on the field-effect sensing property of Si wires

Abstract

Silicon-based field effect transistor (FET) sensors with high sensitivity are emerging as powerful sensors for detecting chemical/biological species. Strain engineering has been demonstrated as an effective means to improve the performance of Si-based devices. However, the strain effect on the field-effect sensing property of silicon materials has not been studied yet. Here, we investigate the strain effect on the field-effect sensing property of silicon wires by taking humidity sensing as an example. The humidity sensitivity of FET sensors based on silicon wires increases with increasing tensile strain but decreases with increasing compressive strain. The sensitivity is very responsive to strain with an enhancement factor of 67 for tensile strain. Theoretical analysis shows that the sensitivity variation under different strains is mainly attributed to the change in adsorption energy between silicon wires and water molecules. This work indicates that strain engineering can be an effective route to modulate the field-effect sensing property of Si wires for constructing highly sensitive Si-based FET sensors.