Water assisted growth of two-dimensional MoS2/MoSe2 vertical heterostructures on molten glass

Abstract

Herein, we demonstrate a chemical vapor deposition route to the controlled growth of large scale MoS₂/MoSe₂ vertical van der Waals heterostructures on a molten glass substrate using water as the oxidizing chemical to guarantee a sufficient and uniform delivery of the metal precursor. This work offers an efficient way for developing other layered heterostructures for integrated electronic and optoelectronic devices.