Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films†
Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol–gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.
- This article is part of the themed collection: Nanoscale 2022 Emerging Investigators