Space-confined CVD growth of 2D-MoS2 crystals with tunable dimensionality via adjusting growth conditions

Abstract

Two-dimensional MoS₂ is demonstrated to be a prospective material for next-generation ultrathin nanoelectronics and optoelectronics. However, it remains an enormous challenge to fabricate high-yield, large-sized, and high-quality monolayered MoS₂ crystals. Here, we present a feasible space-confined chemical vapor deposition method to grow 2D MoS₂ flakes with tunable dimensionality. By tailoring the experimental parameters, such as growth temperature, the amount of S powder, and the distance between Mo foil and growth substrate/S powder, diverse MoS₂ flakes with adjustable edge size can be obtained, and their corresponding thickness and crystalline quality have been evaluated by OM, AFM, Raman and PL techniques. Furthermore, the reason for the evolution of lateral dimension under tuned S amount and adjusted distance between Mo foil and S powder/growth substrate is revealed by the concentration variation of Mo : S. Our study presents an effective pathway to realize the controllable fabrication of 2D TMDC structures with tunable dimensionality via simply adjusting growth conditions.