Here, we report on a simultaneous growth and radical-initiated cross-linking of a hybrid thin film in a layer-by-layer manner via molecular layer deposition (MLD). The cross-linked film exhibited a self-limiting MLD growth behavior and improved properties like 12% higher film density and enhanced stability compared to the non-cross-linked film.
K. Ashurbekova, K. Ashurbekova, I. Saric, E. Modin, M. Petravic, I. Abdulagatov, A. Abdulagatov and M. Knez, Chem. Commun., 2021, 57, 2160 DOI: 10.1039/D0CC07858A
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