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On the importance of pyrolysis for inkjet-printed oxide piezoelectric thin films

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Abstract

Inkjet printing (IJP) is an attractive technology for the low-cost fabrication of functional metal oxide thin films, such as piezoelectric lead zirconate titanate (PZT). Implementation of the well-established chemical solution deposition method for PZT films in the IJP process comes with challenges, which were the focus of several works in the field. However, adequate pyrolysis conditions are also required for the complete elimination of organic residues from the layers before crystallization. Thanks to an original technique based on infra-red spectroscopy, the present study draws the correlation between the amount of residual organics in pyrolyzed inkjet-printed layers on platinized silicon and the porosity and functional properties of the final films. Pyrolysis at 475 °C for 3 min afforded dense {111}-textured 200 nm-thick PZT layers after crystallization at 700 °C, with state-of-the-art electrical properties (Pr = 23 μC cm−2, Ec = 60 kV cm−1, ε′ = 1000 and tan δ = 0.04). Potential of inkjet printing technology for piezoelectric devices is demonstrated through a simple energy harvesting device, with a 5.8 μW power output for a 6 kΩ resistive load.

Graphical abstract: On the importance of pyrolysis for inkjet-printed oxide piezoelectric thin films

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Article information


Submitted
23 Sep 2019
Accepted
02 Jan 2020
First published
14 Feb 2020

This article is Open Access

J. Mater. Chem. C, 2020, Advance Article
Article type
Paper

On the importance of pyrolysis for inkjet-printed oxide piezoelectric thin films

N. Godard, M. A. Mahjoub, S. Girod, T. Schenk, S. Glinšek and E. Defay, J. Mater. Chem. C, 2020, Advance Article , DOI: 10.1039/C9TC05228C

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