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Issue 16, 2020
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Analysis of plasma-grown carbon oxide and reduced-carbon-oxide nanowalls

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Abstract

In this study, several characteristics of carbon oxide nanowalls (CONWs) and reduced-carbon-oxide nanowalls (rCONWs) activated using plasma and thermochemistry were investigated. To become modified CONW and rCONW, catalyst-free carbon nanowalls (CNWs) were grown on a silicon (Si) wafer via microwave-plasma-enhanced chemical vapor deposition (MPECVD) with a mixture of hydrogen (H2) and methane (CH4) gases. The CONW was modified by oxidizing a CNW on a Si wafer with plasma treatment using oxygen (O2) plasma. Afterwards, the CONW was placed in a rapid-thermal-annealing (RTA) chamber, and H2 gas was injected thereto; therefore, the CONW was reduced by H2 gas. The surface properties of the CONW and rCONW were confirmed via scanning electron microscopy (SEM). Raman spectroscopy was used for structural analysis, and the surface energy of each surface was analyzed by operating the contact angle. The chemical characteristics were observed via X-ray photoelectron spectroscopy (XPS). Hall measurements were applied to investigate the electrical characteristics.

Graphical abstract: Analysis of plasma-grown carbon oxide and reduced-carbon-oxide nanowalls

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Article information


Submitted
12 Dec 2019
Accepted
07 Jan 2020
First published
06 Mar 2020

This article is Open Access

RSC Adv., 2020,10, 9761-9767
Article type
Paper

Analysis of plasma-grown carbon oxide and reduced-carbon-oxide nanowalls

H. Choi, S. H. Kwon, H. Kang, J. H. Kim and W. Choi, RSC Adv., 2020, 10, 9761
DOI: 10.1039/C9RA10433J

This article is licensed under a Creative Commons Attribution-NonCommercial 3.0 Unported Licence. Material from this article can be used in other publications provided that the correct acknowledgement is given with the reproduced material and it is not used for commercial purposes.

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    [Original citation] - Published by The Royal Society of Chemistry (RSC) on behalf of the Centre National de la Recherche Scientifique (CNRS) and the RSC.
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    [Original citation] - Published by The Royal Society of Chemistry (RSC) on behalf of the European Society for Photobiology, the European Photochemistry Association, and RSC.
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    [Original citation] - Published by The Royal Society of Chemistry.

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