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Nanobowtie arrays with tunable materials and geometries fabricated by holographic lithography

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Abstract

We introduce a highly efficient method for the fabrication of large area nanobowtie arrays (NBAs) based on a home-built tunable holographic lithography (THL) technique. By elaborately designing pattern templates, NBAs with different materials and geometric parameters can be easily obtained by a two-step approach. Both the plasmonic and semiconductor NBAs with tunable gap sizes and a high uniformity over an area of one square centimetre can be conveniently fabricated. Surface-enhanced Raman spectroscopy (SERS) performance and photoelectric properties have been demonstrated on the gold and TiO2 NBAs, respectively. This THL technique shows unique advantages in fabricating well-defined and large-area nanostructures in a high throughput way, facilitating practical applications in a broad range of fields of optoelectronics.

Graphical abstract: Nanobowtie arrays with tunable materials and geometries fabricated by holographic lithography

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Supplementary files

Article information


Submitted
26 Jul 2020
Accepted
22 Sep 2020
First published
23 Sep 2020

Nanoscale, 2020, Advance Article
Article type
Paper

Nanobowtie arrays with tunable materials and geometries fabricated by holographic lithography

B. Liu, C. Zhan, X. Yao, S. Yan and B. Ren, Nanoscale, 2020, Advance Article , DOI: 10.1039/D0NR05546H

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