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Facile and economical synthesis of nitrogen-rich tantalum nitrides via an ammonia looping process under confined space

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Abstract

Semiconductive nitrogen-rich tantalum nitrides including Ta4N5 and Ta3N5 are successfully synthesized via an ammonia looping process by space-confined thermal decomposition of a unique Ta–(NCNH2)x precursor. This novel approach not only breaks the limit of requiring small-sized tantalum precursors but also considerably reduces ammonia usage in comparison to conventional nitridation methods (0.9 liter vs. 36 liters).

Graphical abstract: Facile and economical synthesis of nitrogen-rich tantalum nitrides via an ammonia looping process under confined space

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Article information


Submitted
20 Mar 2020
Accepted
19 May 2020
First published
20 May 2020

New J. Chem., 2020, Advance Article
Article type
Letter

Facile and economical synthesis of nitrogen-rich tantalum nitrides via an ammonia looping process under confined space

J. Lin, W. Zhao and F. Huang, New J. Chem., 2020, Advance Article , DOI: 10.1039/D0NJ01390K

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