Issue 11, 2020

Nano-LED induced chemical reactions for structuring processes


We present a structuring technique based on the initialization of chemical reactions by an array of nano-LEDs which is used in the near-field as well as in the far-field regime. In the near-field regime, we demonstrate first results with the nano-LED array for lithography using the photoresist DiazoNaphthoQuinone-(DNQ)-sulfonate for the fabrication of holes in the resist down to ∼75 nanometres in diameter. In contrast, the nano-LEDs can also be employed in the far-field regime to expose thin films of the monomer bisphenol A-glycidyl methacrylate (Bis-GMA) and to initialize polymerization locally. Photosensitive films were patterned and spherical cone-shaped three dimensional objects with diameters ranging from ∼480 nm up to 20 micrometres were obtained. The modification in the material as a result of the photochemical reaction induced i.e. by polymerization was confirmed by Raman spectroscopy. This structuring maskless technique has the potential to induce substantial changes in photosensitive molecules and to produce the desired structures from the tens of microns down to the nanometre scale.

Graphical abstract: Nano-LED induced chemical reactions for structuring processes

Article information

Article type
04 Jun 2020
19 Oct 2020
First published
20 Oct 2020
This article is Open Access
Creative Commons BY license

Nanoscale Adv., 2020,2, 5421-5427

Nano-LED induced chemical reactions for structuring processes

M. Mikulics, Z. Sofer, A. Winden, S. Trellenkamp, B. Förster, J. Mayer and H. H. Hardtdegen, Nanoscale Adv., 2020, 2, 5421 DOI: 10.1039/D0NA00851F

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