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Surface-diffusion-limited growth of atomically thin WS2 crystals from core-shell nuclei

Abstract

Atomically thin transition metal dichalcogenides (TMDs) have recently attracted great attention since the unique and fascinating physical properties have been found in various TMDs, implying potential applications in next-generation devices. The progress towards developing new functional and high-performance devices based on TMDs, however, is limited by the difficulty of producing large-area monolayer TMDs due to a lack of knowledge of the growth processes of monolayer TMDs. In this work, we have investigated the growth processes of monolayer WS2 crystals using a thermal chemical vapor deposition method, in which the growth conditions were adjusted in a systematic manner. It was found that, after forming WO3-WS2 core-shell nanoparticles as nucleation sites on a substrate, the growth of three-dimensional WS2 islands proceeds by ripening and crystallization processes. Lateral growth of monolayer WS2 crystals subsequently occurs by surface diffusion process of adatoms toward the step edge of the three-dimensional WS2 islands. Our results provide understanding of the growth processes of monolayer WS2 by using chemical vapor deposition methods.

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Publication details

The article was received on 21 Feb 2019, accepted on 08 Apr 2019 and first published on 09 Apr 2019


Article type: Communication
DOI: 10.1039/C9NR01594A
Citation: Nanoscale, 2019, Accepted Manuscript

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    Surface-diffusion-limited growth of atomically thin WS2 crystals from core-shell nuclei

    S. Jo, J. Jung, J. Baik, J. Kang, I. PARK, T. S. Bae, H. Chung and C. Cho, Nanoscale, 2019, Accepted Manuscript , DOI: 10.1039/C9NR01594A

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