Jump to main content
Jump to site search


Laboratory based GIXRF and GEXRF spectrometers for multilayer investigations

Abstract

This work shows laboratory angular resolved measurements with the goal to establish laboratory techniques to obtain a more complete idea of the intralayer composition of multilayer samples. While X-ray reflectometry is a widely available technique for the characterization of multilayers, angular resolved XRF measurements (grazing emission/incidence X-ray fluorescence) are usually performed at synchrotron radiation facilities. With the development of efficient laboratory spectrometers and evaluation algorithms for angular resolved measurements, these methods become suited for routine measurements and screening. We present two laboratory spectrometers which render quantitative non-destructive elemental depth profiling feasible. For reasons of comparison a validation sample, a nickel-carbon multilayer, is measured with both setups and additional information on a krypton contamination and its distribution retrieved. Additionally, a first application for the characterization of multilayers with sub nanometer layer thicknesses is shown.

Back to tab navigation

Publication details

The article was received on 05 Dec 2018, accepted on 04 Feb 2019 and first published on 11 Feb 2019


Article type: Paper
DOI: 10.1039/C8JA00427G
Citation: J. Anal. At. Spectrom., 2019, Accepted Manuscript
  • Open access: Creative Commons BY license
  •   Request permissions

    Laboratory based GIXRF and GEXRF spectrometers for multilayer investigations

    V. Szwedowski-Rammert, J. Baumann, C. Schlesiger, U. Waldschlaeger, A. Gross, B. Kanngießer and I. Mantouvalou, J. Anal. At. Spectrom., 2019, Accepted Manuscript , DOI: 10.1039/C8JA00427G

    This article is licensed under a Creative Commons Attribution 3.0 Unported Licence. Material from this article can be used in other publications provided that the correct acknowledgement is given with the reproduced material.

    Reproduced material should be attributed as follows:

    • For reproduction of material from NJC:
      [Original citation] - Published by The Royal Society of Chemistry (RSC) on behalf of the Centre National de la Recherche Scientifique (CNRS) and the RSC.
    • For reproduction of material from PCCP:
      [Original citation] - Published by the PCCP Owner Societies.
    • For reproduction of material from PPS:
      [Original citation] - Published by The Royal Society of Chemistry (RSC) on behalf of the European Society for Photobiology, the European Photochemistry Association, and RSC.
    • For reproduction of material from all other RSC journals:
      [Original citation] - Published by The Royal Society of Chemistry.

    Information about reproducing material from RSC articles with different licences is available on our Permission Requests page.

Search articles by author

Spotlight

Advertisements