Jump to main content
Jump to site search
Publishing
Advanced


Crack-free high quality 2-μm-thick Al0.5Ga0.5N grown on Si substrate with a superlattice transitional layer

Yinan Huang,   Jianxun Liu,   Xiujian Sun,   Xiaoning Zhan,   Qian Sun,   Hongwei Gao,   Meixin Feng,   Yu Zhou,   Masao Ikeda  and  Hui Yang  

Abstract

The utilization of Si substrate to fabricate AlGaN-based deep ultraviolet (DUV) light-emitting diodes (LEDs) is deemed as an effective way to improve light extraction efficiency with the thin-film flip-chip architecture, which calls for crack-free high-quality high Al-content AlGaN film grown on Si. In this letter, we reported the successful growth of a crack-free high-quality 2-μm-thick Al0.5Ga0.5N film grown on planar Si by metal-organic chemical vapor deposition. A smooth surface with a root-mean-square roughness of 1.5 nm was obtained by employing a superlattice transitional layer. Double crystal X-ray rocking curves yielded full widths at half maximum of 499 and 648 arcsec for the Al0.5Ga0.5N (0002) and (10-12) reflection planes, respectively, revealing a low threading dislocation density of 3.3 × 109 cm-2. This work paves the way for the realization of cost-effective high-performance AlGaN-based DUV LEDs and photodetectors grown on Si platform.

Back to tab navigation
Download options Please wait...

Publication details

The article was received on 23 Oct 2019, accepted on 26 Nov 2019 and first published on 26 Nov 2019


Article type: Paper
DOI: 10.1039/C9CE01677E
CrystEngComm, 2019, Accepted Manuscript

  •   Request permissions

    Crack-free high quality 2-μm-thick Al0.5Ga0.5N grown on Si substrate with a superlattice transitional layer

    Y. Huang, J. Liu, X. Sun, X. Zhan, Q. Sun, H. Gao, M. Feng, Y. Zhou, M. Ikeda and H. Yang, CrystEngComm, 2019, Accepted Manuscript , DOI: 10.1039/C9CE01677E

    If you are not the author of this article and you wish to reproduce material from it in a third party non-RSC publication you must formally request permission using Copyright Clearance Center. Go to our Instructions for using Copyright Clearance Center page for details.

    Authors contributing to RSC publications (journal articles, books or book chapters) do not need to formally request permission to reproduce material contained in this article provided that the correct acknowledgement is given with the reproduced material.

    Reproduced material should be attributed as follows:

    • For reproduction of material from NJC:
      Reproduced from Ref. XX with permission from the Centre National de la Recherche Scientifique (CNRS) and The Royal Society of Chemistry.
    • For reproduction of material from PCCP:
      Reproduced from Ref. XX with permission from the PCCP Owner Societies.
    • For reproduction of material from PPS:
      Reproduced from Ref. XX with permission from the European Society for Photobiology, the European Photochemistry Association, and The Royal Society of Chemistry.
    • For reproduction of material from all other RSC journals and books:
      Reproduced from Ref. XX with permission from The Royal Society of Chemistry.

    If the material has been adapted instead of reproduced from the original RSC publication "Reproduced from" can be substituted with "Adapted from".

    In all cases the Ref. XX is the XXth reference in the list of references.

    If you are the author of this article you do not need to formally request permission to reproduce figures, diagrams etc. contained in this article in third party publications or in a thesis or dissertation provided that the correct acknowledgement is given with the reproduced material.

    Reproduced material should be attributed as follows:

    • For reproduction of material from NJC:
      [Original citation] - Reproduced by permission of The Royal Society of Chemistry (RSC) on behalf of the Centre National de la Recherche Scientifique (CNRS) and the RSC
    • For reproduction of material from PCCP:
      [Original citation] - Reproduced by permission of the PCCP Owner Societies
    • For reproduction of material from PPS:
      [Original citation] - Reproduced by permission of The Royal Society of Chemistry (RSC) on behalf of the European Society for Photobiology, the European Photochemistry Association, and RSC
    • For reproduction of material from all other RSC journals:
      [Original citation] - Reproduced by permission of The Royal Society of Chemistry

    If you are the author of this article you still need to obtain permission to reproduce the whole article in a third party publication with the exception of reproduction of the whole article in a thesis or dissertation.

    Information about reproducing material from RSC articles with different licences is available on our Permission Requests page.

Search articles by author

Spotlight

Advertisements