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Issue 10, 2019
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Analytical performance of μ-groove silicon attenuated total reflection waveguides

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Abstract

The analytical performance of micromachined μ-groove silicon attenuated total reflection (ATR) elements has been evaluated in a comparison of Fourier-transform infrared (FTIR) and quantum cascade laser (QCL) spectroscopy operating at mid-infrared (MIR) wavelengths. μ-Groove silicon ATR elements are highly efficient micromachined waveguides fabricated at a wafer scale at such low cost that they may be considered a consumable for single-time-use, e.g., in medical application scenarios. Herein, exemplary analytes haven been used for reliably evaluating their analytical performance (i.e., acetate and carbonate) in terms of sensitivity, noise level, and achievable limits of detection in a comparison of broadband vs. narrowband infrared spectroscopy.

Graphical abstract: Analytical performance of μ-groove silicon attenuated total reflection waveguides

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Article information


Submitted
05 Mar 2019
Accepted
30 Mar 2019
First published
05 Apr 2019

Analyst, 2019,144, 3398-3404
Article type
Paper

Analytical performance of μ-groove silicon attenuated total reflection waveguides

J. Haas, A. Müller, L. Sykora and B. Mizaikoff, Analyst, 2019, 144, 3398
DOI: 10.1039/C9AN00417C

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