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Issue 19, 2019, Issue in Progress
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Synthesis of Mg and Zn diolates and their use in metal oxide deposition

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Abstract

The synthesis of complexes [M(OCHMeCH2NMeCH2)2] (5, M = Mg; 7, M = Zn) is described. Treatment of MeHNCH2CH2NMeH (1) with 2-methyloxirane (2) gave diol (HOCHMeCH2NMeCH2)2 (3), which upon reaction with equimolar amounts of MR2 (4, M = Mg, R = Bu; 6, M = Zn, R = Et) gave 5 and 7. The thermal behavior and vapor pressure of 5 and 7 were investigated to show whether they are suited as CVD (= chemical vapor deposition) and/or spin-coating precursors for MgO or ZnO layer formation. Thermogravimetric (TG) studies revealed that 5 and 7 decompose between 80–530 °C forming MgO and ZnO as evidenced by PXRD studies. In addition, TG-MS-coupled experiments were carried out with 7 proving that decomposition occurs by M–O, C–O, C–N and C–C bond cleavages, as evidenced from the detection of fragments such as CH4N+, C2H4N+, C2H5N+, CH2O+, C2H2O+ and C2H3O+. The vapor pressure of 7 was measured at 10.4 mbar at 160 °C, while 5 is non-volatile. The layers obtained by CVD are dense and conformal with a somewhat granulated surface morphology as evidenced by SEM studies. In addition, spin–coating experiments using 5 and 7 as precursors were applied. The corresponding MO layer thicknesses are between 7–140 nm (CVD) or 80 nm and 65 nm (5, 7; spin-coating). EDX and XPS measurements confirm the formation of MgO and ZnO films, however, containing 12–24 mol% (CVD) or 5–9 mol% (spin-coating) carbon. GIXRD studies verify the crystalline character of the deposited layers obtained by CVD and the spin-coating processes.

Graphical abstract: Synthesis of Mg and Zn diolates and their use in metal oxide deposition

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Publication details

The article was received on 23 Jan 2019, accepted on 20 Mar 2019 and first published on 05 Apr 2019


Article type: Paper
DOI: 10.1039/C9RA00585D
RSC Adv., 2019,9, 10657-10669
  • Open access: Creative Commons BY-NC license
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    Synthesis of Mg and Zn diolates and their use in metal oxide deposition

    P. Frenzel, A. Preuß, J. Bankwitz, C. Georgi, F. Ganss, L. Mertens, S. E. Schulz, O. Hellwig, M. Mehring and H. Lang, RSC Adv., 2019, 9, 10657
    DOI: 10.1039/C9RA00585D

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