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Issue 77, 2019
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Three dimensional localization of unintentional oxygen impurities in gallium nitride

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Abstract

Further development of gallium nitride (GaN) based optoelectronic devices requires in-depth understanding of the defects present in GaN grown on a sapphire substrate. In this work, we present three dimensional secondary ion mass spectrometry (SIMS) detection of oxygen. Distribution of these impurities is not homogeneous and the vast majority of oxygen atoms are agglomerated along pillar-shaped structures. Defect-selective etching and scanning electron microscopy imaging complement SIMS results and reveal that oxygen is predominantly present along the cores of screw and mixed dislocations, which proves their high tendency to be decorated by oxygen. A negligible amount of oxygen can be found within the bulk of the material and along the edge dislocations.

Graphical abstract: Three dimensional localization of unintentional oxygen impurities in gallium nitride

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Supplementary files

Article information


Submitted
19 Jun 2019
Accepted
30 Aug 2019
First published
30 Aug 2019

Chem. Commun., 2019,55, 11539-11542
Article type
Communication

Three dimensional localization of unintentional oxygen impurities in gallium nitride

P. P. Michałowski, S. Złotnik and M. Rudziński, Chem. Commun., 2019, 55, 11539
DOI: 10.1039/C9CC04707G

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