Jump to main content
Jump to site search


Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication

Author affiliations

Abstract

Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In this minireview, a number of representative examples is used to demonstrate key mechanisms and unique capabilities of oxygen plasmas and how these can be used in present-day nano-fabrication. In addition to modification and functionalisation processes typical for oxygen plasmas, their ability to catalyse the growth of complex nanoarchitectures is emphasized. Two types of technologies based on oxygen plasmas, namely surface treatment without a change in the size and shape of surface features, as well as direct growth of oxide structures, are used to better illustrate the capabilities of oxygen plasmas as a powerful process environment. Future applications and possible challenges for the use of oxygen plasmas in nanofabrication are discussed.

Graphical abstract: Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication

Back to tab navigation

Publication details

The article was received on 12 Aug 2018, accepted on 03 Sep 2018 and first published on 11 Sep 2018


Article type: Minireview
DOI: 10.1039/C8NR06502K
Citation: Nanoscale, 2018, Advance Article
  •   Request permissions

    Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication

    K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J. W. M. Lim, I. Levchenko and S. Xu, Nanoscale, 2018, Advance Article , DOI: 10.1039/C8NR06502K

Search articles by author

Spotlight

Advertisements