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Issue 8, 2018
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Single crystal diamond membranes for nanoelectronics

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Single crystal, nanoscale diamond membranes are highly sought after for a variety of applications including nanophotonics, nanoelectronics and quantum information science. However, so far, the availability of conductive diamond membranes has remained an unreachable goal. In this work we present a complete nanofabrication methodology for engineering high aspect ratio, electrically active single crystal diamond membranes. The membranes have large lateral directions, exceeding ∼500 × 500 μm2 and are only several hundreds of nanometers thick. We further realize vertical single crystal p–n junctions made from the diamond membranes that exhibit onset voltages of ∼10 V and a current of several mA. Moreover, we deterministically introduce optically active color centers into the membranes, and demonstrate for the first time a single crystal nanoscale diamond LED. The robust and scalable approach to engineer the electrically active single crystal diamond membranes offers new pathways for advanced nanophotonic, nanoelectronic and optomechanical devices employing diamond.

Graphical abstract: Single crystal diamond membranes for nanoelectronics

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The article was received on 06 Dec 2017, accepted on 18 Jan 2018 and first published on 30 Jan 2018

Article type: Paper
DOI: 10.1039/C7NR09097H
Citation: Nanoscale, 2018,10, 4028-4035

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    Single crystal diamond membranes for nanoelectronics

    K. Bray, H. Kato, R. Previdi, R. Sandstrom, K. Ganesan, M. Ogura, T. Makino, S. Yamasaki, A. P. Magyar, M. Toth and I. Aharonovich, Nanoscale, 2018, 10, 4028
    DOI: 10.1039/C7NR09097H

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