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Evaluation of three different sample introduction systems for single-particle inductively coupled plasma mass spectrometry (spICP-MS) applications

Abstract

To realize a ~100% transport efficiency (TE) and a high-throughput sample analysis for nanoparticle characterization using single-particle inductively coupled plasma mass spectrometry (spICP-MS), three sample introduction systems, including a high-performance concentric nebulizer with a heated cyclonic spray chamber and a three-stage Peltier-cooled desolvation system (HPCN-APEX), a conventional sample introduction system (i.e., the commercially available MicroMist nebulizer with a cyclonic spray chamber), and a total consumption (TC) system, were evaluated and compared. The TEs of the HPCN-APEX and TC systems were almost 100% at sample uptake rates of 103 and 9.8 μL/min, respectively, whereas that of the conventional sample introduction system was only 10% at an uptake rate of 112 μL/min. Because of the dried aerosol condition in HPCN-APEX, the size and number detection limits of HPCN-APEX were 1.6-fold and 10-fold lower than those of the TC system. The HPCN-APEX showed better detection efficiency for smaller particles and lower particle numbers. This is beneficial not only for environmental monitoring but also for the ultra-trace analysis of particle impurities in semiconductor process chemicals.

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Publication details

The article was received on 07 Sep 2018, accepted on 06 Dec 2018 and first published on 07 Dec 2018


Article type: Technical Note
DOI: 10.1039/C8JA00295A
Citation: J. Anal. At. Spectrom., 2018, Accepted Manuscript
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    Evaluation of three different sample introduction systems for single-particle inductively coupled plasma mass spectrometry (spICP-MS) applications

    F. Lin, S. Miyashita, K. Inagaki, Y. Liu and I. Hsu, J. Anal. At. Spectrom., 2018, Accepted Manuscript , DOI: 10.1039/C8JA00295A

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