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Controllable conversion of liquid silicon from high-density to low-density towards amorphous silicon nanospheres on a wafer-scale

Abstract

High-density liquid (HDL) silicon can be converted via annealing in hydrogen into low-density liquid (LDL), surviving along with hydrogen protecting. The amorphous silicon (a-Si) spheres on a wafer scale are achieved via an underlying transition from LDL silicon. The amorphous spheres are protected from crystallization due to existence of hydrogen gas.

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Publication details

The article was received on 18 Jul 2018, accepted on 13 Sep 2018 and first published on 13 Sep 2018


Article type: Communication
DOI: 10.1039/C8CC05827J
Citation: Chem. Commun., 2018, Accepted Manuscript
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    Controllable conversion of liquid silicon from high-density to low-density towards amorphous silicon nanospheres on a wafer-scale

    Q. Liu, R. Qi, S. Song, Z. Yan and Q. Huang, Chem. Commun., 2018, Accepted Manuscript , DOI: 10.1039/C8CC05827J

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