Issue 30, 2018

Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor

Abstract

A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5–30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.

Graphical abstract: Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor

Supplementary files

Article information

Article type
Communication
Submitted
08 Jun 2018
Accepted
11 Jul 2018
First published
16 Jul 2018
This article is Open Access
Creative Commons BY license

Nanoscale, 2018,10, 14395-14399

Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor

E. Wajs, G. Rughoobur and A. J. Flewitt, Nanoscale, 2018, 10, 14395 DOI: 10.1039/C8NR04665D

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