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Issue 30, 2018
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Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor

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Abstract

A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5–30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.

Graphical abstract: Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor

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Publication details

The article was received on 08 Jun 2018, accepted on 11 Jul 2018 and first published on 16 Jul 2018


Article type: Communication
DOI: 10.1039/C8NR04665D
Nanoscale, 2018,10, 14395-14399
  • Open access: Creative Commons BY license
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    Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor

    E. Wajs, G. Rughoobur and A. J. Flewitt, Nanoscale, 2018, 10, 14395
    DOI: 10.1039/C8NR04665D

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