C-Axis oriented crystalline IGZO thin-film transistors by magnetron sputtering†
Abstract
We demonstrate the direct formation of c-axis oriented crystalline IGZO thin films at room temperature by magnetron sputtering. The influence of processing parameters such as oxygen partial pressure, post-annealing temperature and channel thickness on the electrical performance of IGZO films and thin-film transistors (TFTs) was intensively investigated. The as-deposited crystalline IGZO TFTs exhibited a mobility of 4.49 cm2 V−1 s−1 and an on/off ratio of 2.08 × 107. For the annealed device, a high mobility of 10.51 cm2 V−1 s−1, a subthreshold swing of 0.672 V decade−1, a threshold voltage of 0.38 V, as well as an on/off current ratio of ∼108 are achieved with an annealing temperature of 400 °C. These results present a significant step towards the development of high-performance TFTs using oriented crystalline IGZO.