A stretchable sensor platform based on simple and scalable lift-off micropatterning of metal nanowire network

Abstract

Micropatterning of conductive nanomaterials (CNs) is one of the most important issues in developing practical stretchable devices. This work presents a systematic micropatterning of CNs by simply combining a well-established lift-off process and facile spray coating of CNs. Various micropatterns made of a silver nanowire (AgNW) percolation network are precisely and stably defined in a large-area elastomeric substrate. Based on systematic lift-off micropatterning coupled with interlayer alignment techniques, resistive and capacitive stretchable sensors are fabricated in a precise and reproducible manner. The usability of the approach is also experimentally confirmed by successfully demonstrating a motion-sensing glove using stretchable resistive strain sensors and a 16 × 16 elastic capacitive tactile sensor array.