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Issue 34, 2016
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Metal assisted catalyzed etched (MACE) black Si: optics and device physics

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Abstract

Metal-assisted catalyzed etching (MACE) of silicon (Si) is a controllable, room-temperature wet-chemical technique that uses a thin layer of metal to etch the surface of Si, leaving behind various nano- and micro-scale surface features, including nanowires (NWs), that can be tuned to achieve various useful engineering goals, in particular with respect to Si solar cells. In this review, we introduce the science and technology of MACE from the literature, and provide an in-depth analysis of MACE to enhance Si solar cells, including the outlook for commercial applications of this technology.

Graphical abstract: Metal assisted catalyzed etched (MACE) black Si: optics and device physics

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Article information


Submitted
03 Jun 2016
Accepted
10 Aug 2016
First published
11 Aug 2016

Nanoscale, 2016,8, 15448-15466
Article type
Review Article

Metal assisted catalyzed etched (MACE) black Si: optics and device physics

F. Toor, J. B. Miller, L. M. Davidson, W. Duan, M. P. Jura, J. Yim, J. Forziati and M. R. Black, Nanoscale, 2016, 8, 15448
DOI: 10.1039/C6NR04506E

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