Jump to main content
Jump to site search

Issue 26, 2016
Previous Article Next Article

Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

Author affiliations

Abstract

Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.

Graphical abstract: Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

Back to tab navigation

Supplementary files

Article information


Submitted
15 Dec 2015
Accepted
17 Feb 2016
First published
17 Feb 2016

This article is Open Access

RSC Adv., 2016,6, 21430-21434
Article type
Communication
Author version available

Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

R. F. Balderas-Valadez, V. Agarwal and C. Pacholski, RSC Adv., 2016, 6, 21430 DOI: 10.1039/C5RA26816H

This article is licensed under a Creative Commons Attribution-NonCommercial 3.0 Unported Licence. You can use material from this article in other publications, without requesting further permission from the RSC, provided that the correct acknowledgement is given and it is not used for commercial purposes.

To request permission to reproduce material from this article in a commercial publication, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party commercial publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.


Social activity

Search articles by author

Spotlight

Advertisements