Jump to main content
Jump to site search
Access to RSC content Close the message box

Continue to access RSC content when you are not at your institution. Follow our step-by-step guide.


Issue 7, 2016
Previous Article Next Article

Layer-by-layer thinning of two-dimensional MoS2 films by using a focused ion beam

Author affiliations

Abstract

A layer-controlled two-dimensional (2D) molybdenum disulfide (MoS2) film with tunable bandgaps is highly desired for the fabrication of electronic/photoelectronic devices. In this work, we demonstrate that a focused ion beam (FIB) can be applied to thin MoS2 films layer-by-layer. The layer number can be controlled by simply changing the Ga+ beam exposure time and the thinning speed is about half a layer per second. OM, AFM, PL and Raman spectra were used to monitor the change of layer numbers and characterize the morphology, thickness, and homogeneity of MoS2 films. The FIB layer-by-layer thinning technology will establish a new methodology for rationally thinning all kinds of 2D layered materials.

Graphical abstract: Layer-by-layer thinning of two-dimensional MoS2 films by using a focused ion beam

Back to tab navigation

Supplementary files

Article information


Submitted
25 Aug 2015
Accepted
17 Dec 2015
First published
22 Dec 2015

Nanoscale, 2016,8, 4107-4112
Article type
Paper
Author version available

Layer-by-layer thinning of two-dimensional MoS2 films by using a focused ion beam

D. Wang, Y. Wang, X. Chen, Y. Zhu, K. Zhan, H. Cheng and X. Wang, Nanoscale, 2016, 8, 4107
DOI: 10.1039/C5NR05768J

Social activity

Search articles by author

Spotlight

Advertisements