Ultrafast synthesis of continuous Au thin films from chloroauric acid solution using an atmospheric pressure plasma jet

Abstract

Au can be easily formed by thermal calcination via the reduction of chloroauric acid. However, a conventional hot-plate or furnace calcination procedure often results in a piecewise and island-like film. In this study, the rapid synthesis of continuous Au thin films from spin-coated chloroauric acid precursor films is demonstrated by using an atmospheric pressure plasma jet (APPJ). The sheet resistance decreases from 2.175 to 0.997 Ω sq⁻¹ as the APPJ processing time increases from 7 to 60 s. This ultrafast synthesis of continuous Au thin films is made possible by the synergistic effect of the highly energetic/reactive nitrogen species and the heat generated by APPJs.