Calibration methods in glow discharge optical emission spectroscopy: a tutorial review

Abstract

Calibration methods used in glow discharge optical emission spectrometry are reviewed. They differ in the ways of handling the variable sputtering rates of different materials. The sputtering rate affects the intensities of emission lines of the elements analyzed and must be corrected for. Algorithms implementing these methods are described, including corrections for line interferences, non-linear calibration functions and the calculation of sputter factors from calibration data. Precision and accuracy are discussed for analysis of medium and high concentrations of the elements and for analysis of low concentrations approaching the limits of detection.