High-resolution on-chip supercapacitors with ultra-high scan rate ability†
Abstract
A simple approach for the fabrication of high-resolution on-chip supercapacitors with increased performances is demonstrated. The resulting micro-devices display high specific cell capacitance (3 mF cm−2 using a hydrous ruthenium oxide electrode) and impressive scan rate abilities, up to 10 000 V s−1 for multi-walled carbon nanotube based micro-supercapacitors, which is five orders of magnitude higher than those of conventional supercapacitors.