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Issue 61, 2014

3D periodic composite nanopatterns with superior mechanical properties: the effect of nanoparticles on pattern contrast and mechanical properties

Author affiliations

Abstract

Three-dimensional (3D) periodic nanopatterns have gained much interest due to their potential applications, ranging from photonics to biological tissue engineering. Here, 3D silica nanoparticle/SU8 composite patterns were fabricated by holographic lithography. Although a uniform composite photoresist film was obtained by mixing epoxy-functionalized silica nanoparticles, the unavoidable scattering by the silica nanoparticles sufficiently changed the photosensitivity of the photoresists, resulting in the decrease of pattern contrast. With careful optimization of the light exposure condition, as well as increased polymer rigidity due to uniform dispersion of the nanoparticles in the polymer matrix, we were able to obtain high contrast 3D nanopatterns with up to 5 wt% silica content. We characterized the mechanical properties by the nanoindentation technique. The incorporation of silica nanoparticles remarkably improved the mechanical stability of the resulting 3D patterns. The mechanical properties of the composite nanopatterns displayed a Young's modulus of 3.8 GPa and a hardness of 0.05 GPa. Although the 3D patterns have a pore volume of around 50%, these mechanical properties are similar to those previously reported for the bulk SU8 films.

Graphical abstract: 3D periodic composite nanopatterns with superior mechanical properties: the effect of nanoparticles on pattern contrast and mechanical properties

Supplementary files

Article information


Submitted
25 May 2014
Accepted
16 Jul 2014
First published
25 Jul 2014

RSC Adv., 2014,4, 32348-32352
Article type
Paper

3D periodic composite nanopatterns with superior mechanical properties: the effect of nanoparticles on pattern contrast and mechanical properties

D. Kang, S. Lee and J. H. Moon, RSC Adv., 2014, 4, 32348 DOI: 10.1039/C4RA04934A

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