Statistics-based electron Moiré technique: a novel method applied to the characterization of mesoporous structures

Abstract

We report a statistics-based electron Moiré method in this study, for the first time, to cope with the highly distorted fringes and to realize the measurement of disordered mesoporous structures. A grey-level co-occurrence matrix is employed to determine the predominant period and the orientation of a randomly distributed Moiré fringe pattern and consequently to obtain the corresponding period/orientation of the test structures. The basic principles, the method descriptions, and the relevant experiments are discussed in detail. Mesoporous alumina films are investigated with the proposed method.