Issue 11, 2014

All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications

Abstract

An all metal based electrostatic nanoelectromechanical switch has been fabricated using a one mask process. High temperature cycling behavior is demonstrated in a vacuum chamber at 300 °C for more than 28 hours. The compelling results indicate that the design is promising for the realization of rugged electronics with three-dimensional integration.

Graphical abstract: All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications

Supplementary files

Article information

Article type
Communication
Submitted
02 Oct 2013
Accepted
25 Feb 2014
First published
17 Apr 2014

Nanoscale, 2014,6, 5606-5611

All metal nanoelectromechanical switch working at 300 °C for rugged electronics applications

Y. Qian, B. W. Soon, P. Singh, H. Campanella and C. Lee, Nanoscale, 2014, 6, 5606 DOI: 10.1039/C3NR05255A

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