Issue 3, 2014

Selective catalytic burning of graphene by SiOx layer depletion

Abstract

We report catalytic decomposition of few-layer graphene on an Au/SiOx/Si surface wherein oxygen is supplied by dissociation of the native SiOx layer at a relatively low temperature of 400 °C. The detailed chemical evolution of the graphene covered SiOx/Si surface with and without gold during the catalytic process is investigated using a spatially resolved photoelectron emission method. The oxygen atoms from the native SiOx layer activate the gold-mediated catalytic decomposition of the entire graphene layer, resulting in the formation of direct contact between the Au and the Si substrate. The notably low contact resistivity found in this system suggests that the catalytic depletion of a SiOx layer could realize a new way to micromanufacture high-quality electrical contact.

Graphical abstract: Selective catalytic burning of graphene by SiOx layer depletion

Supplementary files

Article information

Article type
Paper
Submitted
03 Sep 2013
Accepted
24 Oct 2013
First published
28 Oct 2013

Nanoscale, 2014,6, 1474-1479

Selective catalytic burning of graphene by SiOx layer depletion

K. Lee, K. Ihm, Y. Kumar, J. Baik, M. Yang, H. Shin, T. Kang, S. Chung and B. H. Hong, Nanoscale, 2014, 6, 1474 DOI: 10.1039/C3NR04692C

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements