Issue 3, 2013
From the journal:

Journal of Materials Chemistry C

A novel Surface Tension Assisted Lithography (STAL) technique for microfabrication of 3D structures

Mahyar Nasabi,*a   Francisco J. Tovar-Lopez,a   Khashayar Khoshmanesh,a   Gorgi Kostovskia  and  Arnan Mitchella  

* Corresponding authors

a School of Electrical and Computer Engineering, RMIT University, GPO Box 2476, Melbourne, VIC 3001, Australia
E-mail: mahyar.nasabi@gmail.com

Abstract

A novel Surface Tension Assisted Lithography (STAL) technique is proposed to fabricate 3D structures in the photo-patternable polymer, SU-8, using a sequence of soft-imprint lithography, photo-lithography, and polymer reflow. The dimensions of the reflowed 3D structures are controlled by the volume of material initially displaced by soft-imprinting, and the lateral dimensions of the reflow container, defined by photo-lithography.

Graphical abstract: A novel Surface Tension Assisted Lithography (STAL) technique for microfabrication of 3D structures

About
Cited by
Related
Download options Please wait...

Article information

DOI
https://doi.org/10.1039/C2TC00516F
Article type
Communication
Submitted
29 Oct 2012
Accepted
13 Nov 2012
First published
13 Nov 2012

J. Mater. Chem. C, 2013,1, 401-405

Permissions

Request permissions

A novel Surface Tension Assisted Lithography (STAL) technique for microfabrication of 3D structures

M. Nasabi, F. J. Tovar-Lopez, K. Khoshmanesh, G. Kostovski and A. Mitchell, J. Mater. Chem. C, 2013, 1, 401 DOI: 10.1039/C2TC00516F

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements