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Issue 3, 2014
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Parallelization of thermochemical nanolithography

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One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

Graphical abstract: Parallelization of thermochemical nanolithography

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25 Oct 2013
24 Nov 2013
First published
29 Nov 2013

Nanoscale, 2014,6, 1299-1304
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Author version available

Parallelization of thermochemical nanolithography

K. M. Carroll, X. Lu, S. Kim, Y. Gao, H. Kim, S. Somnath, L. Polloni, R. Sordan, W. P. King, J. E. Curtis and E. Riedo, Nanoscale, 2014, 6, 1299
DOI: 10.1039/C3NR05696A

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