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Issue 3, 2014
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Parallelization of thermochemical nanolithography

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Abstract

One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

Graphical abstract: Parallelization of thermochemical nanolithography

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Article information


Submitted
25 Oct 2013
Accepted
24 Nov 2013
First published
29 Nov 2013

Nanoscale, 2014,6, 1299-1304
Article type
Communication
Author version available

Parallelization of thermochemical nanolithography

K. M. Carroll, X. Lu, S. Kim, Y. Gao, H. Kim, S. Somnath, L. Polloni, R. Sordan, W. P. King, J. E. Curtis and E. Riedo, Nanoscale, 2014, 6, 1299
DOI: 10.1039/C3NR05696A

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