Jump to main content
Jump to site search

Issue 8, 2013
Previous Article Next Article

Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

Author affiliations

Abstract

We report on the fabrication of nanofluidic channels directly buried in silicate glass with transverse widths down to less than 50 nm using three-dimensional (3D) femtosecond laser direct writing. Using this technique, integrated micro-nanofluidic systems have been produced by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been used to demonstrate DNA analysis, e.g. stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.

Graphical abstract: Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

Back to tab navigation

Supplementary files

Publication details

The article was received on 19 Oct 2012, accepted on 04 Feb 2013 and first published on 06 Feb 2013


Article type: Paper
DOI: 10.1039/C3LC41171K
Lab Chip, 2013,13, 1626-1631

  •   Request permissions

    Direct laser writing of sub-50 nm nanofluidic channels buried in glass for three-dimensional micro-nanofluidic integration

    Y. Liao, Y. Cheng, C. Liu, J. Song, F. He, Y. Shen, D. Chen, Z. Xu, Z. Fan, X. Wei, K. Sugioka and K. Midorikawa, Lab Chip, 2013, 13, 1626
    DOI: 10.1039/C3LC41171K

Search articles by author

Spotlight

Advertisements