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Issue 18, 2013
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Thermal oxidation of Ni films for p-type thin-film transistors

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Abstract

p-Type nanocrystal NiO-based thin-film transistors (TFTs) are fabricated by simply oxidizing thin Ni films at temperatures as low as 400 °C. The highest field-effect mobility in a linear region and the current on–off ratio are found to be 5.2 cm2 V−1 s−1 and 2.2 × 103, respectively. X-ray diffraction, transmission electron microscopy and electrical performances of the TFTs with “top contact” and “bottom contact” channels suggest that the upper parts of the Ni films are clearly oxidized. In contrast, the lower parts in contact with the gate dielectric are partially oxidized to form a quasi-discontinuous Ni layer, which does not fully shield the gate electric field, but still conduct the source and drain current. This simple method for producing p-type TFTs may be promising for the next-generation oxide-based electronic applications.

Graphical abstract: Thermal oxidation of Ni films for p-type thin-film transistors

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Article information


Submitted
16 Jan 2013
Accepted
14 Mar 2013
First published
15 Mar 2013

Phys. Chem. Chem. Phys., 2013,15, 6875-6878
Article type
Paper

Thermal oxidation of Ni films for p-type thin-film transistors

J. Jiang, X. Wang, Q. Zhang, J. Li and X. X. Zhang, Phys. Chem. Chem. Phys., 2013, 15, 6875
DOI: 10.1039/C3CP50197C

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