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Issue 36, 2013
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Sensitized excited free-radical processes as read–write tools: impact on non-linear lithographic processes

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Abstract

A prefluorescent radical probe in which a 2,2,6,6-tetramethylpiperidine-N-oxyl (TEMPO) unit is sensitized with visible light via energy transfer from a tethered coumarin dye has been synthesized. The excited TEMPO moiety undergoes hydrogen abstraction from a polymer with concomitant functionalization of the polymeric matrix; this writing process can be reversed thermally. The fluorescent probes can be bleached under high intensity illumination, making these new materials suitable for dual-tone lithography with potential applications in sub-diffraction lithographic imaging.

Graphical abstract: Sensitized excited free-radical processes as read–write tools: impact on non-linear lithographic processes

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Publication details

The article was received on 22 Apr 2013, accepted on 24 Jun 2013 and first published on 25 Jun 2013


Article type: Paper
DOI: 10.1039/C3CP51723C
Phys. Chem. Chem. Phys., 2013,15, 14873-14878

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    Sensitized excited free-radical processes as read–write tools: impact on non-linear lithographic processes

    S. Impellizzeri, K. G. Stamplecoskie and Juan. C. Scaiano, Phys. Chem. Chem. Phys., 2013, 15, 14873
    DOI: 10.1039/C3CP51723C

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