Sub-50 nm patterning of functional oxides by soft lithographic edge printing†
Abstract
We report a fast, versatile and reproducible method to make arbitrary nanoscale patterns of functional metal
* Corresponding authors
a
MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, Netherlands
E-mail:
j.e.tenelshof@utwente.nl
Fax: +31 534892990
Tel: +31 534892695
We report a fast, versatile and reproducible method to make arbitrary nanoscale patterns of functional metal
A. George and J. E. ten Elshof, J. Mater. Chem., 2012, 22, 9501 DOI: 10.1039/C2JM31121F
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