- Article type
- Feature Article
- 29 Nov 2011
- 22 Dec 2011
- First published
- 04 Jan 2012
Atomic layer deposition for nanofabrication and interface engineering
M. Liu, X. Li, S. K. Karuturi, A. I. Y. Tok and H. J. Fan, Nanoscale, 2012, 4, 1522 DOI: 10.1039/C2NR11875K
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