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Issue 13, 2012
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Superelastic metal microsprings as fluidic sensors and actuators

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Abstract

Superelastic metal microsprings fabricated by deterministic rolling of nanomembranes have been anisotropic-strain-engineered via glancing angle deposition. The advantageous applications of metal microsprings in liquid flow rate sensors and chemical-stimulated actuators due to their reliable superelasticity are demonstrated. Theoretical calculation of microspring elongation as a function of flow rate agrees with our experimental observation and reveals that the sensitivity can be well tuned by the geometrical design of the microsprings. Such outstanding mechanical properties of rolled-up metal microsprings should find important applications in future fluidic micro-/nano-devices.

Graphical abstract: Superelastic metal microsprings as fluidic sensors and actuators

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Supplementary files

Article information


Submitted
12 Feb 2012
Accepted
13 Mar 2012
First published
20 Mar 2012

Lab Chip, 2012,12, 2322-2328
Article type
Paper

Superelastic metal microsprings as fluidic sensors and actuators

W. Li, G. Huang, J. Wang, Y. Yu, X. Wu, X. Cui and Y. Mei, Lab Chip, 2012, 12, 2322
DOI: 10.1039/C2LC40151G

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