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Issue 17, 2012
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Biocompatible “click” wafer bonding for microfluidic devices

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Abstract

We introduce a novel dry wafer bonding concept designed for permanent attachment of micromolded polymer structures to surface functionalized silicon substrates. The method, designed for simultaneous fabrication of many lab-on-chip devices, utilizes a chemically reactive polymer microfluidic structure, which rapidly bonds to a functionalized substrate via “click” chemistry reactions. The microfluidic structure consists of an off-stoichiometry thiol-ene (OSTE) polymer with a very high density of surface bound thiol groups and the substrate is a silicon wafer that has been functionalized with common bio-linker molecules. We demonstrate here void free, and low temperature (< 37 °C) bonding of a batch of OSTE microfluidic layers to a silane functionalized silicon wafer.

Graphical abstract: Biocompatible “click” wafer bonding for microfluidic devices

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Article information


Submitted
11 Nov 2011
Accepted
14 May 2012
First published
15 May 2012

Lab Chip, 2012,12, 3032-3035
Article type
Technical Innovation

Biocompatible “click” wafer bonding for microfluidic devices

F. Saharil, C. F. Carlborg, T. Haraldsson and W. van der Wijngaart, Lab Chip, 2012, 12, 3032
DOI: 10.1039/C2LC21098C

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